Interlayer dielectric under stress for an integrated circuit

ABSTRACT

An integrated circuit that has logic and a static random access memory (SRAM) array has improved performance by treating the interlayer dielectric (ILD) differently for the SRAM array than for the logic. The N channel logic and SRAM transistors have ILDs with non-compressive stress, the P channel logic transistor ILD has compressive stress, and the P channel SRAM transistor at least has less compressive stress than the P channel logic transistor, i.e., the P channel SRAM transistors may be compressive but less so than the P channel logic transistors, may be relaxed, or may be tensile. It is beneficial for the integrated circuit for the P channel SRAM transistors to have a lower mobility than the P channel logic transistors. The P channel SRAM transistors having lower mobility results in better write performance; either better write time or write margin at lower power supply voltage.

FIELD OF THE INVENTION

This invention relates to integrated circuits, and more particularly tointegrated circuits that have an interlayer dielectric that is stressedto improve performance of the integrated circuits.

BACKGROUND OF THE INVENTION

One of the techniques that has been under development to improvetransistor mobility is strained silicon. Typically the silicon layer isput under tensile stress to improve the N channel mobility. This hasbeen extended to using an interlayer dielectric (ILD), a dielectriclayer between conductive layers, that is under a selected stress toimprove transistor performance. For N channel transistors this has meantusing tensile stress, and for P channel transistors this has meant usingcompressive stress.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and further and more specific objects and advantages ofthe invention will become readily apparent to those skilled in the artfrom the following detailed description of a preferred embodimentthereof taken in conjunction with the following drawings:

FIG. 1 is a cross section of a semiconductor structure at a stage inprocessing according to multiple embodiments of the invention;

FIG. 2 is a cross section of the semiconductor structure of FIG. 1 at asubsequent stage in processing according to first, second, third, andfourth embodiments of the invention;

FIG. 3 is a cross section of the semiconductor structure of FIG. 2 at asubsequent stage in processing according to the first and fourthembodiments of the invention;

FIG. 4 is a cross section of the semiconductor structure of FIG. 3 at asubsequent stage in processing according to the first and fourthembodiments of the invention;

FIG. 5 is a cross section of the semiconductor structure of FIG. 4 at asubsequent stage in processing according to the first and fourthembodiments of the invention;

FIG. 6 is a cross section of the semiconductor structure of FIG. 5 at asubsequent stage in processing according to the first embodiment of theinvention;

FIG. 7 is a cross section of the semiconductor structure of FIG. 2 at asubsequent stage in processing according to the second and thirdembodiments of the invention;

FIG. 8 is a cross section of the semiconductor structure of FIG. 7 at asubsequent stage in processing according to the second and thirdembodiments of the invention;

FIG. 9 is a cross section of the semiconductor structure of FIG. 8 at asubsequent stage in processing according to the second embodiment of theinvention;

FIG. 10 is a cross section of the semiconductor structure of FIG. 9 at asubsequent stage in processing according to the second embodiment of theinvention;

FIG. 11 is a cross section of the semiconductor structure of FIG. 10 ata subsequent stage in processing according to the second embodiment ofthe invention;

FIG. 12 is a cross section of the semiconductor structure of FIG. 11 ata subsequent stage in processing according to the second embodiment ofthe invention;

FIG. 13 is a cross section of the semiconductor structure of FIG. 8 at asubsequent stage in processing according to the third embodiment of theinvention;

FIG. 14 is a cross section of the semiconductor structure of FIG. 13 ata subsequent stage in processing according to the third embodiment ofthe invention;

FIG. 15 is a cross section of the semiconductor structure of FIG. 5 at asubsequent stage in processing according to the fourth embodiment of theinvention; and

FIG. 16 is a cross section of the semiconductor structure of FIG. 15 ata subsequent stage in processing according to the fourth embodiment ofthe invention;

DETAILED DESCRIPTION OF THE INVENTION

In one aspect an integrated circuit that has both logic and a staticrandom access memory (SRAM) array has improved performance by treatingthe interlayer dielectric (ILD) differently for the SRAM array than forthe logic. The N channel logic and N channel SRAM transistors both haveILDs with non-compressive stress, the P channel transistor ILD hascompressive stress, and the P channel SRAM transistors at least haveless compressive stress than the P channel logic transistors, i.e., theP channel SRAM transistors may be compressive but with less magnitude ofsuch compressive stress than the logic P channel transistors, may berelaxed, or may be tensile. It has been found to be advantageous for theintegrated circuit for the P channel SRAM transistors to have a lowermobility than the P channel logic transistors. The P channel SRAMtransistors having lower mobility results in better write performance;either better write time or write margin at lower power supply voltage.This is better understood by reference to the drawings and the followingdescription.

Shown in FIG. 1 is a semiconductor device 10 comprising using an SOIsubstrate comprising a relatively thick insulating layer 12 and asemiconductor layer 14. Semiconductor layer 14 is preferably silicon butcould be another semiconductor material such as silicon germanium orsilicon carbon. Insulating layer 12 is preferably oxide but could beanother insulating material. Semiconductor device 10 has built therein alogic region 16 and an SRAM array region 18. Shown in FIG. 1, logicportion 16 comprises an N channel transistor 20 and a P channeltransistor 22. Transistors 20 and 22 are representative of many other,typically millions, N and P channel transistors that would be present ona typical integrated circuit for the purpose of forming logic functioncircuits such as logic gates, registers, and processing units, as wellas other logic function circuits. Similarly shown in FIG. 1, SRAM arrayportion 18 comprises an N channel transistor 24 and a P channeltransistor 26. Transistors 24 and 26 are similarly representative ofmany other, typically millions, N and P channel transistors that wouldform an SRAM array. Logic transistors 20 and 22 are isolated from eachother and other transistors by isolation regions 28, 30, and 32 formedin semiconductor layer 14. Similarly SRAM transistors 24 and 26 areseparated from each other and other SRAM transistors by isolationregions 34, 36, and 38.

Shown in FIG. 2 is semiconductor device 10 after deposition of adielectric layer 40 over logic portion 16 and SRAM array portion 18.Dielectric layer 40 is deposited with tensile stress. An exemplarymaterial of dielectric layer 40 is silicon nitride deposited byplasma-enhanced chemical vapor deposition (PECVD). The amount of tensilestress is selectable based on the parameters of the deposition.Dielectric layer 40 has a thickness of about half the height of the gateof transistors 20, 22, 24, and 26. In this example, that would makedielectric layer 40 about 500 Angstroms in thickness.

Shown in FIG. 3 is semiconductor device 10 after selectively removingdielectric layer from transistor 22, which is a P channel transistor,which suffers a reduction in mobility with tensile stress.

Shown in FIG. 4 is semiconductor device 10 after deposition of adielectric layer 42 over logic portion 16 and SRAM array portion 18.Dielectric layer 42 is deposited with compressive stress and ofsubstantially the same thickness as dielectric layer 40. Dielectriclayer 42 is also preferably silicon nitride deposited by PECVD but withthe parameters chosen to make it compressive.

Shown in FIG. 5 is semiconductor device 10 after selectively etchingdielectric layer 42 so that dielectric layer 42 remains only overtransistor 22 with a small overlap over dielectric layer 40. The etch,although done with a mask step, does result in dielectric layer 40 beingexposed to the etch after dielectric layer 42 has been etched through.Because both dielectric layers 40 and 42 are of similar composition,silicon nitride formed with different parameters, there is a smallselectivity between the two layers. Thus, this is preferably a timedetch. It may be desirable to form dielectric layer 40 to a little morethickness than dielectric layer 42 to account for some over-etch intodielectric layer 40. The result at this point is that N channeltransistors 20 and 24 have an ILD that is tensile, the SRAM P channelhas an ILD that is tensile, and the logic P channel has an ILD that iscompressive. This provides for enhanced mobility for transistors 20, 22,and 24 and reduced mobility for transistor 26. Transistor 26, as a Pchannel transistor in an SRAM array, is used as a pull-up transistor.Such pull-up transistor with lower mobility improves write performance.This write performance can be either in the write margin for low powersupply voltage applications or for a faster write.

Shown in FIG. 6 is semiconductor device 10 after formation of adielectric layer 44 that completes formation of an ILD over transistors20, 22, 24, and 26. Dielectric layer 44 is preferably an oxide such asTEOS or another oxide such as doped glass or even another insulatingtype of material. Dielectric layer 44 is preferably of a material thatcan be planarized and has a stress that is or is nearly relaxed. Aftercompletion of dielectric layer 44, metal layer formation can proceed forproviding interconnect for the integrated circuit.

Shown in FIG. 7 is a semiconductor device 45 that follows fromsemiconductor device 10 of FIG. 2 after an etch that removes dielectriclayer from over transistor 26 as well as transistor 22. Analogousfeatures from FIGS. 1-6 are retained for FIG. 7.

Shown in FIG. 8 is semiconductor device 45 after deposition ofdielectric layer 42, which deposition is the same as shown in FIG. 4,over transistors 20, 22, 24, and 26.

Shown in FIG. 9 is semiconductor device 45 after selectively removinglayer 42 from over transistors 20, 24, and 26. The partial removal ofdielectric layer 42 is performed in the same as in FIG. 5. The result inthis case is that transistor 26 does not have a dielectric layer in themanner that transistors 20, 22, and 24 have.

Shown in FIG. 10 is semiconductor device 45 after deposition of adielectric layer 46 over logic portion 16 and SRAM array portion 18.This dielectric layer is also substantially the same thickness asdielectric layers 40 and 42 is also silicon nitride deposited by PECVD.In this case the deposition parameters are chosen so that dielectriclayer 46 is at least less compressive than dielectric layer 42. Thismeans that dielectric layer 46 is one of compressive but lesscompressive than dielectric layer 42, relaxed, or tensile. If tensile,this would preferably be of an amount different than that of dielectriclayer 40.

Shown in FIG. 11 is semiconductor device 45 after dielectric layer 46has been selectively removed from over transistors 20, 22, and 24. Thisresults in N channel transistors 20 and 24 having an ILD that istensile, P channel transistor 22 having an ILD that is compressive, andP channel transistor 46 having an ILD that is at least less compressivethan that of transistor 42. The SRAM cells thus have a pull-uptransistor that has less mobility than the P channel transistor used inthe logic portion of the integrated circuit. This is beneficial for SRAMcells and results in improved write margin or write speed.

Shown in FIG. 12 is semiconductor device 45 with a completed ILD showingthe formation of a dielectric layer 44, which is planar, overtransistors 20, 22, 24, and 26. Metal interconnect formation can proceedover dielectric layer 44.

Shown in FIG. 13 is a semiconductor device 49 that follows fromsemiconductor device 45 of FIG. 8 after an etch that removes dielectriclayer 42 from over transistors 20 and 24 so that dielectric layer 42remains over transistors 22 and 26. Analogous features from FIGS. 1-12are retained for FIG. 13. At this stage P channel transistors 22 and 26have the same compressive stress.

Shown in FIG. 14 is semiconductor device 49 after forming an implantmask 50 over transistors 20, 22, and 24 and implanting with an implant52 into dielectric layer 42 to cause it to convert to a dielectric layer54 that at least has less compressive stress than dielectric layer 42.Implant mask 50 is preferably photoresist but could be anotherappropriate material. Implant 52 is preferably xenon but could beanother implant species that would have the effect of reducing theamount of compressive stress of dielectric layer 54. This implant isparticularly useful in causing dielectric layer 42 to become relaxed.The result of the implant is to have P channel pull-ups in the SRAMcells that have less mobility and thus result in improved write marginor improved write speed.

Shown in FIG. 15 is a semiconductor device 55 that follows fromsemiconductor device 10 of FIG. 5 after formation of an implant mask 56is formed over transistors 20, 22, and 24. Analogous features from FIGS.1-6 are retained for FIG. 13. This shows that a portion of dielectriclayer 40 that is over transistor 26 is exposed.

Shown in FIG. 16 is semiconductor device 55 after performing an implant58 that reduces the tensile stress of the exposed portion of dielectriclayer 40 so that it becomes dielectric layer 60. This approach isparticularly useful when it is desired that the P channel pull-up besomewhat tensile, to reduce the mobility, but not so tensile as for theN channel transistors. If the pull-up becomes too tensile, the readstatic noise margin can degrade. The result of the implant is still tohave P channel pull-ups in the SRAM cells that have less mobility thanthe logic P channels and thus result in improved write margin orimproved write speed.

Various changes and modifications to the embodiments herein chosen forpurposes of illustration will readily occur to those skilled in the art.For example, the order of formation of dielectric layers can be changed.Instead of forming tensile layer 40 first, compressive layer 42 could beformed first. Also these embodiments have been shown using an SOIsubstrate but another substrate type, such as bulk or bulk-SOI hybrid,could also be used. To the extent that such modifications and variationsdo not depart from the spirit of the invention, they are intended to beincluded within the scope thereof which is assessed only by a fairinterpretation of the following claims.

1. A semiconductor device, comprising: a logic portion comprising a first N channel transistor and a first P channel transistor; a static random access memory (SRAM) array portion comprising a second N channel transistor and a second P channel transistor; a first ILD over the first P channel transistor having a compressive stress; and a second ILD over the second P channel transistor having a stress that is at least less compressive than the compressive stress of the first ILD.
 2. The semiconductor device of claim 1, wherein the first ILD and the second ILD comprise silicon nitride of different stresses.
 3. The semiconductor device of claim 1, wherein the second P channel transistor functions as a pull-transistor in the SRAM array.
 4. The semiconductor device of claim 1, wherein the second ILD is over the first and second N channel transistors.
 5. The semiconductor device of claim 1, further comprising a third ILD over the first and second N channel transistors having tensile stress.
 6. The semiconductor device of claim 1, wherein the stress of the second ILD is compressive.
 7. The semiconductor device of claim 1, wherein the stress of the second ILD is relaxed.
 8. The semiconductor device of claim 1, wherein the stress of the second ILD is tensile.
 9. The semiconductor device of claim 8, further comprising a third ILD over the first and second N channel transistors having a tensile stress that is more tensile than the second ILD.
 10. A semiconductor device, comprising: a first portion comprising a first transistor of the first type and a first transistor of a second type for use in a circuit of a first type; a second portion comprising a second transistor of the first type and a second transistor of the second type for use in a circuit of a second type; a first ILD over the first transistor of the first type having a first stress of a first type; and a second ILD over the second transistor of the first type having a second stress that is at least less than the first stress of the first type.
 11. The semiconductor device of claim 10, wherein: the first transistor of the first type and the second transistor of the first type are P channel transistors; and the first stress of the first type is compressive.
 12. The semiconductor device of claim 11, wherein the circuit of the first type is a logic circuit and the circuit of the second type is an SRAM array.
 13. The semiconductor device of claim 12, wherein the second transistor of the first type is a pull-up transistor in the SRAM array.
 14. The semiconductor device of claim 13, further comprising a third ILD over the first and second transistors of the second type having a tensile stress.
 15. The semiconductor device of claim 13, wherein the second ILD is over the first and second transistors of the second type.
 16. A method of making a semiconductor device comprising: forming a first N channel transistor that is used in a logic circuit; forming a first P channel transistor that is used in the logic circuit; forming a second N channel transistor that is used in a SRAM array; forming a second P channel transistor that is used in the SRAM array; depositing a first dielectric layer over the semiconductor device that has a first stress; removing the first dielectric layer over the first P channel transistor; depositing a second dielectric layer over the semiconductor device that has a second stress that is more compressive than the first stress; and removing the second dielectric layer over the first and second N channel transistors and the second P channel transistor.
 17. The method of claim 16 wherein the first stress is tensile, further comprising implanting into a first portion of the first dielectric layer that is over the second P channel transistor to cause the first portion of the first dielectric layer to become less tensile.
 18. A method of making a semiconductor device comprising: forming a first N channel transistor that is used in a logic circuit; forming a first P channel transistor that is used in the logic circuit; forming a second N channel transistor that is used in a SRAM array; forming a second P channel transistor that is used in the SRAM array; depositing a first dielectric layer over the semiconductor device that has a first stress; removing the first dielectric layer over the first and second P channel transistors; depositing a second dielectric layer over the semiconductor device that has a second stress that is more compressive than the first stress; and removing the second layer over the first and second N channel transistors and the second P channel transistor; depositing a third dielectric layer over the semiconductor device that has a third stress that is between the first stress and the second stress; removing the third dielectric layer over the first and second N channel transistors and the first P channel transistor.
 19. A method of making a semiconductor device comprising: forming a first N channel transistor that is used in a logic circuit; forming a first P channel transistor that is used in the logic circuit; forming a second N channel transistor that is used in a SRAM array; forming a second P channel transistor that is used in the SRAM array; depositing a first dielectric layer over the semiconductor device that has a first stress; removing the first dielectric layer over the first and second P channel transistors; depositing a second dielectric layer over the semiconductor device that has a second stress that is more compressive than the first stress; and removing the second dielectric layer over the first and second N channel transistors whereby a first portion of the second dielectric layer is left on the first P channel transistor and a second portion of the second dielectric layer is left over the second P channel transistor; and implanting into the second portion of the second dielectric layer to cause the second portion of the second dielectric layer to become less compressive.
 20. A method of making a semiconductor device, comprising: forming a first portion comprising a first transistor of the first type and a first transistor of a second type for use in a circuit of a first type; forming a second portion comprising a second transistor of the first type and a second transistor of the second type for use in a circuit of a second type; forming a first ILD over the first transistor of the first type having a first stress of a first type; and forming a second ILD over the second transistor of the first type having a second stress that is at least less than the first stress of the first type. 